About xlith®

xlith offers services and products related to pattern generation in the 10nm … 250nm regime with applications in microelectronics, photonics and nanotechnology.

The company was founded 1997 by Dr. Bernd Maile.

xlith offered the first commercial direct write e-beam lithography service on Si, GaAs, InP, SiC, GaN, Diamond, Fused Silica and other substrates.

The company builds upon more than 35 years of experience in ultra-high resolution electron beam lithography.

xlith has served many demanding customers in industry and academia.

The brand names:

  • xlith®
  • extreme lithography®
  • we know how to write nanometer®

are worldwide registered trademarks of xlith GmbH / Germany.

Our company brochure can be downloaded here.

xlith has adopted a fully certified quality management system according to ISO 9001:2015.

Copyright © 2000-2023 xlith GmbH. All rights reserved.