Masters for Nano Imprint Lithography

In Nano Imprint Lithography (NIL), a template with nanometer features is pressed into a resist cast, creating a thickness modulation.

Hot embossing and injection molding are two prominent variants of this technology. A third variant uses transparent templates and low viscosity, UV-curable monomeric resists.

xlith fabricates templates for Nano Imprint Lithography based on Si and Quartz / Fused Silica substrates.

Soft lithography methods utilize elastomeric stamps, replicated from a nanopatterned master substrate. xlith fabricates high resolution soft lithography masters based on SOI substrates.